- “Polaris,” developed by GE scientists, is a foundry process flow for developing high precision navigation devices with Microelectromechanical Systems (MEMS)
- IntelliSense offers software package that will enable clients to customize their MEMS navigation solutions using Polaris more easily
- GE Research’s Polaris process enables high precision navigation devices without GPS
NISKAYUNA, NY – March 2, 2022 – GE Research, a strategic provider of MEMS foundry services, and IntelliSense Software Corporation, a leading MEMS solution provider, today announced a joint activity to enhance the availability of GE’s MEMS foundry process flow called “Polaris,” for the development of MEMS inertial devices of navigation-grade at low cost.
Todd Miller, Director and Executive Mission Leader, Electronics and Sensing at GE Research says, “We built the Polaris process with Inertial Navigation Grade MEMS in mind that we are now offering a turnkey foundry process. We are excited to be working with IntelliSense, which will be applying software that enables customers to more easily design and customize their MEMS solutions.”
Miller noted that the longest part of the design-built-test cycle for Polaris is the design phase. “Every new designer is confronted by ‘white-space’, those ten-thousand choices,” Todd says. “By modelling Polaris in the IntelliSense software and providing a process development kit and design example support in Polaris, we are going to get customers into the fab faster with fewer costly mistakes.”
Caption: Infrared image of a MEMS device fabricated using GE's POLARIS process
With only five drawn layers, and a twelve week turn-time, Polaris has achieved the lowest barrier to inertial MEMS on the market today, sporting wafer level, vacuum packaged MEMS with through-silicon-via. It’s all silicon MEMS built on SOI technology offers device layers from 25- 150um thick. Devices built in Polaris are naturally capable of high temperature operation. Click here for more details.
Sripadaraja, Manager, Applications and Sales, IntelliSense Software, said that this joint activity of providing GE Research’s Polaris on IntelliSuite, allows users to quickly simulate this process flow, understand and optimize the complete device structure with designed masks and associated PDK (process design kits) which include DRC (design rule check). Using “IntelliSuite: Complete MEMS simulation software” will help in optimizing the inertial MEMS device designs with custom mask sets. Further, Multiphysics and System Integration simulations are also possible. This is essential, as it benefits the users by improving product quality, reduce physical prototyping time and costs enabling, and faster realisation of optimal design.
About GE Research
GE Research is GE’s innovation powerhouse where research meets reality. We are a world-class team of scientific, engineering, and marketing minds working at the intersection of physics and markets, physical and digital technologies, and across a broad set of industries to deliver world-changing innovations and capabilities for our customers. The Center’s research campus in Niskayuna, New York, has a 28,000 sq. ft., Class 100 (ISO 9001 certified) cleanroom facility, which can support technology from R&D through low-volume production and transfer technology to high-volume manufacturing (www.ge.com/research/).
About IntelliSense Software Corporation.
IntelliSense is a privately owned company headquartered outside of Boston, Massachusetts, USA. The team ignited the MEMS industry 25 years ago with its IntelliSuite®: A family of innovative CAD tools. IntelliSuite is the industry-leading software tool set for MEMS layout design, advanced process simulation, FEA, parametric analysis, system simulation, packaging analysis and more. Covering all aspects of the MEMS design cycle, IntelliSuite provides a ground-breaking, end-to-end software solution for MEMS professionals. With users in over 30 countries, IntelliSense is the leading MEMS software vendor (www.intellisense.com).