MEMSuite™

Micro-Electro-Mechanical Systems (MEMS) devices often sit at the intersection of optical, electrical and mechanical domains, and by integrating these various elements can offer unique solutions for a wide variety of problems (switches, DLM displays, accelerometer, gyro's, pressure sensors).  

This can pose challenges in testing, as not only must we measure the combined behavior of these multiple elements, but must do so for a very small size scale (microns or below). This presents a measurement challenge, and demands tightly integrated test capabilities to perform the required tasks. This often requires the integration of multiple measurement types, including but not limited to optical, electrical and mechanical techniques.  

GE Research has developed powerful test software to allow for the integration and synchronization of complex measurements to work with a wide variety of test equipment and devices focused on MEMS.  

MEMSuite™ is an integrated vision and actuation automation tool for MEMS testing and beyond based on the Lua scripting language.

It features a modular design that allows use on a wide variety of test equipment from a long working distance interferometer station to an automated wafer prober.